Assisted selective growth of highly dense and vertically aligned carbon nanotubes

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United States of America Patent

APP PUB NO 20100117764A1
SERIAL NO

11405657

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Abstract

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The selective growth of vertically aligned, highly dense carbon nanotube (CNT) arrays using a thermal catalytic chemical vapor deposition (CCVD) method via selection of the supporting layer where the thin catalyst layer is deposited on. A thin iron (Fe) catalyst deposited on a supporting layer of tantalum (Ta) yielded CCVD growth of the vertical dense CNT arrays. Cross-sectional transmission electron microscopy revealed a Vollmer-Weber mode of Fe island growth on Ta, with a small contact angle of the islands controlled by the relative surface energies of the supporting layer, the catalyst and their interface. The as-formed Fe island morphology promoted surface diffusion of carbon atoms seeding the growth of the CNTs from the catalyst surface.

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INTELLECTUAL VENTURES HOLDING 40 LLC7251 WEST LAKE MEAD BLVD SUITE 300 LAS VEGAS NV 89128

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ho, Paul S Austin, US 18 259
Shi, Li Austin, US 46 332
Wang, Yunyu Austin, US 16 3133
Yao, Zhen Austin, US 42 377

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