TEMPERATURE CONTROL DEVICE

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20100116484A1
SERIAL NO

12608900

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The temperature control device comprises a heating pathway that heats and circulates the fluid in the temperature adjustment unit, a cooling pathway that cools and circulates the fluid in the temperature adjustment unit, a bypass pathway that circulates the fluid in the temperature adjustment unit without passing the fluid through the heating pathway and the cooling pathway, an adjustment means that adjusts a flow ratio of the fluid that is supplied from the heating pathway, cooling pathway, and bypass pathway to the temperature adjustment unit, and a flow means that flows the fluid in order to circulate the fluid, and wherein a heating unit for heating the fluid is arranged in the heating pathway, and the flow means is disposed downstream from the heating unit along at least one of the pathways for circulating the fluid.

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITED3-1 AKASAKA 5-CHOME MINATO-KU TOKYO 107-6325
CKD CORPORATION250 OUJI 2-CHOME KOMAKI-SHI AICHI 485-8551

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
HIROSE, Yasuhisa Komaki-shi, JP 7 39
KOKUBO, Norio Komaki-shi, JP 9 28
KUSAKA, Kazuhiko Komaki-shi, JP 1 6
MINATANI, Takahiro Komaki-shi, JP 7 38
NISHIKAWA, Keiichi Komaki-shi, JP 17 156

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