VACUUM-COATING MACHINE WITH MOTOR-DRIVEN ROTARY CATHODE
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United States of America Patent
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app pub date -
Jan 11, 2010
filing date -
Aug 10, 2005
priority date (Note) -
Abandoned
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Abstract
In a vacuum-coating machine (1), the drive unit (6) is mounted compliantly to the chamber housing (3) by means of an elastic intermediate plate (14), such that said drive unit can follow a wobbling motion imposed by the rotary cathode (10), with the support bearing (19) of the free end of the rotary cathode (18) capable of being of a rigid design.
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