VACUUM DEPOSITION APPARATUS PART AND VACUUM DEPOSITION APPARATUS USING THE PART
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United States of America Patent
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Issued Date -
May 6, 2010
app pub date -
Jul 11, 2007
filing date -
Mar 22, 2007
priority date (Note) -
Abandoned
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Abstract
A vacuum depositing apparatus part constituting a vacuum depositing apparatus for depositing a thin film forming material vaporized in a vacuum chamber on a substrate, the vacuum depositing apparatus part includes: a part body; and a sprayed film integrally formed to a surface of the part body, the sprayed film preferably has a plurality of dimples formed to a surface thereof, and the dimples preferably have an average depth of 10 μm or less. The vacuum depositing apparatus part is capable of stably and effectively preventing a peel-off and dropping-off of a film forming material adhered to the apparatus parts during the film forming operation, capable of suppressing a lowering of productivity of the film product or suppressing an increase of a film forming cost accompanied by a frequent cleaning of the depositing apparatus or a frequent exchange of the apparatus part, and capable of preventing a generation of fine particles.
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