COMPOSITION COMPRISING CHELATING AGENTS CONTAINING AMIDOXIME COMPOUNDS

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United States of America Patent

APP PUB NO 20100105595A1
SERIAL NO

12260672

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention is a novel aqueous cleaning solution for use in semiconductor front end of the line (FEOL) manufacturing process wherein the cleaning solution comprises at least one amidoxime compound.

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Patent Owner(s)

Patent OwnerAddress
EKC TECHNOLOGY INC2520 BARRINGTON COURT HAYWARD CA 94545

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lee, Wai Mun Fremont, US 93 1252

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