TWO-STEP FORMATION OF HYDROCARBON-BASED POLYMER FILM
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United States of America Patent
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Issued Date -
Apr 29, 2010
app pub date -
Oct 27, 2008
filing date -
Oct 27, 2008
priority date (Note) -
Abandoned
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Abstract
A method of forming a surface-treated hydrocarbon-based polymer film includes: supplying a hydrocarbon gas as a source gas, and an inert gas, and applying RF power to generate a plasma and form a hydrocarbon-based principal film on a substrate; and without extinguishing a plasma, changing flow of the hydrocarbon gas and the inert gas by continuously decreasing a flow ratio of the hydrocarbon gas to the inert gas with time to treat a surface of the principal film on the substrate.
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