METHOD AND APPARATUS FOR PREPARING TUNGSTEN HEXAFLUORIDE USING A FLUIDIZED BED REACTOR
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United States of America Patent
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Issued Date -
Apr 29, 2010
app pub date -
Feb 19, 2009
filing date -
Oct 28, 2008
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Abandoned
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Abstract
Disclosed herein are a method of preparing tungsten hexafluoride (WF.sub.6) gas by fluidizing tungsten powder with inert gas in a reactor and fluorinating the fluidized tungsten powder with fluorine (F.sub.2) or nitrogen trifluoride (NF.sub.3) gas, and an apparatus (including fluidized bed reactor) for carrying out the method. The fluidized bed reactor shows a reaction efficiency of higher than 99% when being used to prepare tungsten hexafluoride.
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