ELECTRON BEAM APPARATUS
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United States of America Patent
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Issued Date -
Apr 29, 2010
app pub date -
Mar 22, 2007
filing date -
Mar 22, 2007
priority date (Note) -
Abandoned
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Abstract
A writing apparatus includes a beam current detector which detects abeam current of the electron beam during execution of the writing when the substrate is not irradiated; a fluctuation value calculator which calculates a fluctuation value of the electron beam based on the beam current; and a corrector which corrects the electron beam fluctuation during the writing based on the fluctuation value.
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