Line narrowing module

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United States of America Patent

SERIAL NO

12653584

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Abstract

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An apparatus is disclosed which may comprise a grating receiving light, a first prism moveable to coarsely select an angle of incidence of the light on the grating, and a second prism moveable to finely select an angle of incidence of the light on the grating. In one application, the apparatus may be used as a line narrowing module for a laser light source.

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Patent Owner(s)

Patent OwnerAddress
CYMER INCCALIFORNIA USA CALIFORNIA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Algots, J Martin San Diego, US 14 344
Bergstedt, Robert A Carlsbad, US 23 548
Dyer, Timothy S Auburn, US 32 447
Gillespie, Walter D Poway, US 39 3229
Kulgeyko, Vladimir A San Diego, US 3 25
Partlo, William N Poway, US 183 6942
Rylov, German E Poway, US 10 140
Sandstrom, Richard L Encinitas, US 136 5606
Strate, Brian San Diego, US 4 34

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