Confocal microscope
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United States of America Patent
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Issued Date -
Apr 22, 2010
app pub date -
Oct 16, 2008
filing date -
Oct 16, 2008
priority date (Note) -
Abandoned
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Abstract
A confocal microscope that can reduce the measurement time is provided. Linear bright lines are extracted from the light of a light source. White light emitted from the linear bright lines is chromatically dispersed into continuous wavelength components by a chromatic aberration lens, which then irradiate a sample on a stage via an objective lens. The chromatically dispersed linear bright lines are continuously imaged for each wavelength on an optical axis in the height direction, and light having one wavelength is focused on one certain point on the surface of the sample. The reflected light of light having wavelengths focused on a surface of the sample is collected by the chromatic aberration lens via the objective lens and then focused on a slit. The light passed through the slit is separated by a spectroscopic device and imaged on a two-dimensional array photodetector.
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