Micromechanical element and sensor for monitoring a micromechanical element
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United States of America Patent
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Feb 19, 2013
Grant Date -
Apr 22, 2010
app pub date -
Sep 25, 2009
filing date -
Sep 30, 2008
priority date (Note) -
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Abstract
A micromechanical element includes a movable functional element, a first retaining element, a second retaining element, a third retaining element, and a fourth retaining element. The first retaining element and the functional element are connected at a first junction, the second retaining element and the functional element are connected at a second junction, the third retaining element and the functional element are connected at a third junction, and the fourth retaining element and the functional element are connected at a fourth junction. In addition, the first retaining element and the second retaining element each include a piezoelectric driving element, the driving element of the first retaining element and the driving element of the second retaining element being configured to move the functional element in accordance with electric excitation.
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