DEVICE MANUFACTURED BY ROOM-TEMPERATURE BONDING, DEVICE MANUFACTURING METHOD, AND ROOM-TEMPERATURE BONDING APPARATUS

United States of America Patent

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Issued Date
Apr 15, 2010
app pub date
May 30, 2007
filing date
May 30, 2006

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Abandoned

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Abstract

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substrates) are bonded at room-temperature to have practical bonding strength.

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Patent Owner(s)

Patent Owner	Address
MITSUBISHI HEAVY INDUSTRIES MACHINE TOOL CO LTD	130 ROKUJIZO RITTO-SHI SHIGA 520-3080

International Classification(s)

B32B:LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA....

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Funayama, Masahiro	Yokohama, JP	8	99
Goto, Takayuki	Yokohama, JP	103	726
Ide, Kensuke	Ritto, JP	36	467
Takagi, Hideki	Tsukuba-shi, JP	35	388
Utsumi, Jun	Yokohama, JP	26	142

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DEVICE MANUFACTURED BY ROOM-TEMPERATURE BONDING, DEVICE MANUFACTURING METHOD, AND ROOM-TEMPERATURE BONDING APPARATUS

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United States of America Patent

12302873

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12302873

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