FLOW RATE CONTROL DEVICE
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United States of America Patent
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-
N/A
Issued Date -
Apr 15, 2010
app pub date -
Sep 16, 2009
filing date -
Oct 10, 2008
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
The flow rate control device is equipped with a pilot regulator that applies operating pressure by using air supplied to one surface of a diaphragm provided in the regulator and adjusts the flow rate of a chemical liquid contacting the opposite surface, and with an electropneumatic regulator that controls supply and discharge of air to adjust the operating pressure for the pilot regulator. The flow rate control device is equipped with an air passage that connects and passes air between the pilot regulator and electropneumatic regulator, and an orifice that enables adjustment of operating pressure by the electropneumatic regulator while discharging air from the air passage.
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