Ion current measurement device
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United States of America Patent
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Jan 10, 2012
Grant Date -
Apr 8, 2010
app pub date -
Oct 7, 2008
filing date -
Oct 7, 2008
priority date (Note) -
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Abstract
The invention provides an ion current measurement device for a tool having an ion source. The ion current measurement device comprises an ion collecting cup and a replaceable liner. The ion collecting cup is disposed in the tool and the ion collecting cup possesses a cup opening facing the ion source. The replaceable liner is disposed in the ion collecting cup and the replaceable liner entirely covers a continuous inner sidewall of the ion collecting cup.
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