Micro-Electromechanical System Microstructure
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Apr 8, 2010
app pub date -
Oct 2, 2008
filing date -
Oct 2, 2008
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A micro-electromechanical system microstructure includes: a substrate adapted to support an electrode thereon; a suspension mechanism supported on the substrate; and a movable active part adapted to cooperate with the electrode to define a capacitor therebetween, and suspended on the substrate through the suspension mechanism so as to be movable to and fro relative to the substrate and the electrode. The suspension mechanism includes at least one supporting frame that protrudes from and that cooperates with an outer surface of the substrate to define a frame space therebetween, and at least one cantilever beam interconnecting the supporting frame and the active part.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully