Electron Column Using A Magnetic Lens Layer Having Permanent Magnets
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United States of America Patent
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Issued Date -
Apr 8, 2010
app pub date -
Oct 9, 2007
filing date -
Oct 11, 2006
priority date (Note) -
Abandoned
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Abstract
Disclosed herein is an electron column using a magnetic lens layer. The electron column includes a magnetic lens layer for condensing an electron beam using permanent magnets. The magnetic lens layer includes a support plate, an aperture formed through the support plate, and permanent magnets arranged around the aperture and disposed on or inserted into the support plate.
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