Electrostatic actuator and power generator
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United States of America Patent
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Aug 16, 2011
Grant Date -
Apr 1, 2010
app pub date -
Dec 3, 2009
filing date -
Aug 28, 2007
priority date (Note) -
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Abstract
This electrostatic actuator includes an electret film and a conductor layer formed on the electret film, and the conductor layer is so formed as to have a sectional shape reduced in width upward from the side closer to the electret film.
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