SEALING APPARATUS OF WAFER CARRIER AND SEALING METHOD THEREOF
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United States of America Patent
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Issued Date -
Apr 1, 2010
app pub date -
Oct 1, 2008
filing date -
Oct 1, 2008
priority date (Note) -
Abandoned
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Abstract
The present invention discloses a sealing apparatus of a wafer carrier and a sealing method, and the wafer carrier is comprised of a wafer container and a cover, and includes a latch unit for integrally latch the wafer container and the cover. The wafer container has an open distal portion disposed on a surface of wafer container, and the sealing apparatus is installed between the open distal portion and the cover. The sealing apparatus includes an air intake/outtake valve and an air inflation sealing unit coupled to the air intake/outtake valve, and the air intake/outtake valve performs an air inflation to expand the air inflation sealing unit, and the wafer container and the cover are elastically latched after the inflation and the expansion of the air inflation sealing unit to achieve the sealing effect.
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