USE OF DIFFERENT PAIRS OF OVERLAY LAYERS TO CHECK AN OVERLAY MEASUREMENT RECIPE
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United States of America Patent
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Issued Date -
Mar 11, 2010
app pub date -
Sep 10, 2008
filing date -
Sep 10, 2008
priority date (Note) -
Abandoned
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Abstract
An overlay measurement recipe is checked for reliability as follows. A first pair of overlay layers (130, 150) is formed (610), and the recipe is used to obtain alignment measurements for the two layers. Then another pair of overlay layers (130, 150) is obtained (630), possibly using the same masks, but this time at least one of the layers (150) is offset from its previous position. The overlay measurement recipe is used again to obtain alignment measurements (640). The two sets of measurements are checked against the offset of the layers from their previous positions to validate the recipe. Other embodiments are also provided.
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