ACTUATOR USING PIEZOELECTRIC ELEMENT AND METHOD OF DRIVING THE SAME
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United States of America Patent
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Issued Date -
Mar 11, 2010
app pub date -
Sep 10, 2009
filing date -
Sep 10, 2008
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Abandoned
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Abstract
An actuator using a piezoelectric element and a method of driving the same. The actuator includes at least one piezoelectric cell moving by displacement according to an input voltage, at least one piezoelectric sensor sensing the displacement of the at least one piezoelectric cell, an error detector detecting an error in the at least one piezoelectric sensor, and a feedback signal generator generating a feedback signal corresponding to the error, thereby performing micromirror driving and sensing.
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