Apparatus and method for determining the focus position
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United States of America Patent
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Issued Date -
Mar 11, 2010
app pub date -
Sep 8, 2009
filing date -
Sep 9, 2008
priority date (Note) -
Abandoned
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Abstract
An apparatus and a method for determining the focus of an optical system on a substrate are disclosed. A light source emits an auxiliary light beam into an auxiliary beam path, wherein the auxiliary light beam, after splitting, is offset in relation to an optical axis of a measuring objective. At least one optical switch is provided in the auxiliary beam path for switching the path of the auxiliary beam path from one side offset from the optical axis to the other side offset from the optical axis of the measuring objective.
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