OFF-AXIS LIGHT SOURCE, LIGHT SCREEN PLATE, AND METHOD OF DEFINING DIFFERENT TYPES OF PATTERNS WITH SINGLE EXPOSURE
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United States of America Patent
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Issued Date -
Mar 11, 2010
app pub date -
Sep 11, 2008
filing date -
Sep 11, 2008
priority date (Note) -
Abandoned
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Abstract
An off-axis light source is described, including an X-dipole illumination pattern, a Y-dipole illumination pattern and a quadrupole illumination pattern at the illumination surface thereof, wherein the illumination area of the quadrupole illumination pattern is smaller than that of the X- or Y-dipole illumination pattern. A light screen plate is also described, having corresponding openings therein and can be used to form the above off-axis light source. A method of defining different types of patterns with a single exposure is also described, which utilizes the above off-axis light source.
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