Reticle Cleaning Device
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United States of America Patent
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N/A
Issued Date -
Mar 11, 2010
app pub date -
Sep 30, 2008
filing date -
Sep 9, 2008
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A reticle cleaning device, comprising: a chamber body having a sealed chamber, within which is a reticle stage for carrying a reticle, wherein a frame attached with a protective membrane is included on the reticle; an optical component, for transmitting a light beam to the protective membrane on the reticle and receiving light beam reflected from the protective membrane and outputting a signal to indicate the upward and downward expansion change of protective membrane on the reticle; a pump, for exhausting the air inside the sealed chamber of chamber body to form negative pressure in the sealed chamber for separating contaminants or chemical contaminants on the reticle; and a controller, for receiving the signal from the optical component, wherein when the upward and downward expansion change of the protective membrane on the reticle indicated by the signal exceeds a pre-set value, the controller outputs another signal to terminate the operation of the pump.
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