PHOTORESIST COMPOSTION, METHOD FOR FORMING THIN FILM PATTERNS, AND METHOD FOR MANUFACTURING A THIN FILM TRANSISTOR USING THE SAME

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United States of America Patent

APP PUB NO 20100055851A1
SERIAL NO

12389031

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Abstract

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The present invention relates to a photoresist composition that comprises a resin that is represented by Formula 1, a method for forming a thin film pattern, and a method for manufacturing a thin film transistor array panel by using the same.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG DISPLAY CO LTD95 SAMSUNG 2 RO GIHEUNG-GU YONGIN-CITY GYEONGGI-DO
AZ ELECTRONIC MATERIALS (KOREA) LTD7TH FL SHINWON BLDG #823-14 YEOKSAM-DONG GANGNAM-GU SEOUL 135-080

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hong, Pil-Soon Suwon-si, KR 7 38
Jeon, Woo-Seok Seongnam-si, KR 33 92
Kang, Doek-Man Seongnam-si, KR 5 7
Lee, Chang-Ik Cheonan-si, KR 4 73
Lee, Hi-Kuk Yongin-si, KR 72 259
Oh, Sae-Tae Pyeongtaek-si, KR 10 19
Park, Jung-In Suwon-si, KR 32 108
Yun, Sang-Hyun Suwon-si, KR 25 50

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