Wafer alignment platform
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United States of America Patent
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Issued Date -
Mar 4, 2010
app pub date -
Aug 28, 2008
filing date -
Aug 28, 2008
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A wafer alignment platform serves to align a wafer so as to make the wafer be carried by a vacuum device that is vertically movable and revolvable. A laser detecting device detects a positioning mark on the wafer and aligns the positioning mark to a directional mark so as to automatically perform center alignment and orientation of the wafer.
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