Process for making dense mixed metal Si3N4 targets
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United States of America Patent
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app pub date -
Nov 5, 2009
filing date -
Sep 13, 2002
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Abstract
, and a sintering aid so that the targets will successfully sputter without cracking, etc. The components are combined in powder form and pressure consolidated under heated conditions for a time sufficient to form a consolidated blend having an actual density of greater than about 95% of the theoretical density. The consolidated blend may then be machined so as to provide the final desired target.
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