TEMPERATURE CONTROL SYSTEM FOR A DEVICE UNDER TEST
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United States of America Patent
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Issued Date -
Feb 18, 2010
app pub date -
Aug 11, 2009
filing date -
Aug 11, 2008
priority date (Note) -
Abandoned
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Abstract
A temperature control system for an optical microscope for inspecting an integrated circuit device under test (DUT) that includes a first fluid circulation system coupled to and supplying fluid to fluid injectors that spray fluid on the DUT and a second fluid circulation system for exchanging energy between fluids in the first fluid circulation system and the second fluid circulation system (e.g., via a heat exchanger). The fluid injectors may be configured to mix the fluid and pressurized air that can be sprayed on the DUT to cool and/or heat the DUT.
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