MODULAR & SCALABLE INTRA-METAL CAPACITORS

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United States of America Patent

APP PUB NO 20100038752A1
SERIAL NO

12192131

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An intra-metal capacitor unit cell comprises a first electrode and a second electrode formed in the same device layer. A dielectric layer separates the electrodes. The first electrode is substantially surrounded by the second electrode. Misalignment between the first and second electrodes does not substantively alter the capacitance of the unit cell.

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Patent Owner(s)

Patent OwnerAddress
CHARTERED SEMICONDUCTOR MANUFACTURING LTD60 WOODLANDS INDUSTRIAL PARK D STREET 2 SINGAPORE 738406

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
CHU, Sanford Singapore, SG 54 672
HO, Chaw Sing Singapore, SG 23 371
KHU, Kerwin Singapore, SG 4 16
NG, Chit Hwei Singapore, SG 24 435

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