Systems and methods for a target and backing plate assembly

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United States of America Patent

SERIAL NO

12586319

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A target and backing plate assembly and method of making the same. The target and backing plate assembly provides a mechanical interlock between the target and backing plate in addition to diffusion bonding between dissimilar materials comprising the target and backing plate. An interlayer may also be used between the target and backing plate. A plurality of ridges, or other salient surface features on one of the target and backing plate are joined to corresponding members or channels on the other of the target and backing plate. The dissimilar materials of the target and backing plate fill negative angled cavities formed by the plurality of ridges and corresponding channels or members of the target and backing plate to accommodate the diffusion bonded dissimilar materials. A target and backing plate assembly with increased strength results.

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Patent Owner(s)

Patent OwnerAddress
TOSOH SMD INCGROVE CITY OH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ivanov, Eugene Y Grove City, US 46 502

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