CVD Device with Substrate Holder with Differential Temperature Control
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United States of America Patent
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app pub date -
Aug 31, 2009
filing date -
Jul 4, 2001
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Abandoned
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Abstract
The invention relates to a device for depositing especially crystalline layers on an especially crystalline substrate, comprising a high-frequency heated substrate support from a conductive material on which the substrate is two-dimensionally supported, and which comprises a zone of higher conductivity. The system is specifically characterized in that the higher conductivity zone is associated with the surface of support of the substrate and substantially corresponds to the area occupied by the substrate. Further, the zone on which the substrate rests heats up more than the substrate surface surrounding the substrate.
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