APPARATUS AND METHOD FOR CHEMICAL VAPOR DEPOSITION

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United States of America Patent

APP PUB NO 20100034970A1
SERIAL NO

12375332

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Abstract

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to deposit the coating film.

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Patent Owner(s)

Patent OwnerAddress
KISCO LTDOSAKA 541-8513
DAISANKASEI CO LTDTOKYO JAPAN TOKYO METROPOLIS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Inoue, Takashi Chiba, JP 662 7614
Mochizuki, Tsutomu Chiba, JP 15 158
Uetake, Kazuyoshi Tokyo, JP 1 2

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