METHOD OF PLASMA TREATMENT OF A SURFACE
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United States of America Patent
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Issued Date -
Feb 11, 2010
app pub date -
Jul 19, 2007
filing date -
Jul 31, 2006
priority date (Note) -
Abandoned
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Abstract
The present invention includes methods of plasma treating a surface of an object. A hollow body, which has one wall made of dielectric material, is filled with a process gas and sealed to form a gas-tight inner chamber having an internal pressure of at least 0.5 bar. The hollow body is then positioned in a space between two electrodes. The space has an external pressure of at least 0.5 bar and is filled with a gas which has a higher ignition field strength than the process gas. A plasma is then ignited in the inner chamber of the hollow body by applying a sufficiently high alternating voltage to the electrodes.
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