THIN PLATE STORAGE TRANSPORT SYSTEM AND RETICLE CASE USING THE SAME
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United States of America Patent
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Issued Date -
Feb 4, 2010
app pub date -
Nov 24, 2006
filing date -
Nov 24, 2006
priority date (Note) -
Abandoned
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Abstract
A thin plate storage transport system including a pressure container for containing a thin plate provided with a container main body for containing one or a plurality of thin plates, a lid body attached by covering the container main body, and a seal for airtightly isolating a containing space formed inside from an outside environment when the container main body is closed and covered by the lid body; and a pressure supply device for setting a pressure inside the containing space at a set pressure higher than an outside pressure by supplying a pressure into the containing space of the pressure container for containing a thin plate. As a result, the inside of the containing space can be kept at high cleanliness for a long time.
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