CONTINUOUS COATING INSTALLATION, METHODS FOR PRODUCING CRYSTALLINE SOLAR CELLS, AND SOLAR CELL
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United States of America Patent
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app pub date -
Aug 11, 2009
filing date -
Feb 27, 2007
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Abandoned
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Abstract
A continuous coating installation is disclosed. The installation includes a vacuum chamber having a supply opening for supplying a substrate to be coated and a discharge opening for discharging the coated substrate. The installation also includes a physical vapour deposition device for coating a surface of the substrate, and a laser crystallization system for simultaneously illuminating at least one sub-partial area of a currently coated partial area of the surface of the substrate with at least one laser beam. The installation further includes a transport device for transporting the substrate in a feedthrough direction from the supply opening to the discharge opening and for continuously or discontinuously moving the substrate during the coating thereof in the feedthrough direction.
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