VAPORIZER, SEMICONDUCTOR PRODUCTION APPARATUS AND PROCESS OF SEMICONDUCTOR PRODUCTION
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United States of America Patent
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Issued Date -
Jan 28, 2010
app pub date -
Feb 27, 2006
filing date -
Feb 27, 2006
priority date (Note) -
Abandoned
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Abstract
. Consequently, the efficiency in the use of the raw material gas can be improved remarkably, according to the quantity of the raw material gas that is not thrown away in the process of forming a thin film of one atomic or molecular layer one by one.
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