DLC COATING SYSTEM AND PROCESS AND APPARATUS FOR MAKING COATING SYSTEM
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United States of America Patent
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Aug 19, 2009
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Apr 12, 2000
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Abstract
Subgroup and silicon, the transition layer comprising carbon and at least one element from the above-mentioned Group, and the cover layer consisting essentially adamantine carbon, the layer system having a hardness of at least 15 GPa, preferably at least 20 GPa, and an adhesion of at least 3 HF.
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