SCANNING PROBE MICROSCOPE WITH TILTED SAMPLE STAGE

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United States of America Patent

APP PUB NO 20100017920A1
SERIAL NO

12502177

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Abstract

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A scanning probe microscope has a tilting stage on which a sample is mounted. The sample is scanned back and forth with the stage being tilted clockwise during a forward scan and counterclockwise during a reverse scan. A first surface contour of the sample is determined from the response of the probe and the tilt angle of the stage during the forward scan. A second surface contour of the sample is determined from the response of the probe and the tilt angle of the stage during the reverse scan. A final surface contour of the sample is obtained by combining the first and second surface contours.

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Patent Owner(s)

Patent OwnerAddress
PARK SYSTEMS CORPKANC 4F LUI-DONG 906-10 SUWON 443-766

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kim, Jitae Anyang-city, KR 29 328
Kim, Joonhul Seoul, KR 1 6
Kim, Yong-Seok Seoul, KR 92 880
Lee, Hyunwoo Suwon-city, KR 195 3232
Park, San-IL Seongnam-city, KR 1 6

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