CRYOPUMP LOUVER EXTENSION
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United States of America Patent
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Issued Date -
Jan 21, 2010
app pub date -
May 29, 2009
filing date -
Jul 17, 2008
priority date (Note) -
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Abstract
A standard size cryopump adapted to be mounted behind a nonstandard gate valve by extending the inlet array to a larger diameter. A standard size cryopump adapted to be mounted behind a nonstandard gate valve by using an extension attached to flanges, where the flanges correspond to the diameter of the nonstandard gate valve.
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