PLASMA GENERATING APPARATUS AND FILM FORMING APPARATUS USING PLASMA GENERATING APPARATUS

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Aug 13, 2009
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Apr 24, 2007

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Abstract

as Wi. At least one magnet is included which is stronger in intensity of a repulsive magnetic field at the center of the beam.

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Patent Owner	Address
CANON ANELVA CORPORATION	2-5-1 KURIGI ASAO-KU KAWASAKI-SHI KANAGAWA-KEN 2158550

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Inventor Name	Address	# of filed Patents	Total Citations
Nakagawara, Hitoshi	Tokyo, JP	5	7

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PLASMA GENERATING APPARATUS AND FILM FORMING APPARATUS USING PLASMA GENERATING APPARATUS

Number of patents in Portfolio can not be more than 2000

United States of America Patent

12541002

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12541002

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