METHOD OF MODULATING RESONANT FREQUENCY OF TORSIONAL MEMS DEVICE
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United States of America Patent
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Issued Date -
Jan 7, 2010
app pub date -
Sep 9, 2008
filing date -
Jul 2, 2008
priority date (Note) -
Abandoned
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Abstract
A method of modulating resonant frequency of a torsional MEMS device is provided. A torsional MEMS device is provided and a resonant frequency test is performed to measure a raw frequency of the torsional MEMS device. If the raw resonant frequency of the torsional MEMS device is greater than a standard resonant frequency, at least one mass increaser is bonded to the torsional MEMS device. Therefore, the raw resonant frequency is reduced as much as the standard resonant frequency.
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