VIBRATION ISOLATOR
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United States of America Patent
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N/A
Issued Date -
Jan 7, 2010
app pub date -
Jun 30, 2009
filing date -
Jul 1, 2008
priority date (Note) -
Abandoned
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Abstract
There is provided a vibration isolator capable of, (1) vibration isolation performance for ground motion disturbance: vibration isolation for floor vibration, and (2) vibration control performance for direct acting disturbance: suppression of swing due to driving reaction force caused by stage movement, significantly improving the above (2), i.e., the vibration control performance, with keeping the above (1), i.e., the vibration isolation performance, at a high level.
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