POLARIZATION IMAGING
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United States of America Patent
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app pub date -
Sep 1, 2009
filing date -
Apr 21, 2006
priority date (Note) -
Abandoned
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Abstract
A system and method for inspection a substrate for various defects is herein disclosed. Polarizing filters are used to improve the contrast of polarization dependent defects such as defocus and exposure defects, while retaining the same sensitivity to polarization independent defects, such as pits, voids, cracks, chips and particles.
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