METHOD AND DEVICE FOR MACHINING A TARGET USING A FEMTOSECOND LASER BEAM
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United States of America Patent
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Issued Date -
Dec 31, 2009
app pub date -
Jun 28, 2007
filing date -
Jun 29, 2006
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Abandoned
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Abstract
The invention relates to a method and device for machining a target using a femtosecond laser beam. The invention consists in taking advantage of the deterministic nature of the ablation threshold and the nonlinear dependence thereof through the use of amplitude or phase pupillary filtering using the polarising effect or any other technique in order to reduce significantly the machining dimensions obtained by focusing a laser beam in nanotechnologies. One such filtering process modifies the distribution of the intensity in the focal plane such as to reduce the maximum of the central component of the spectrum of laser pulses while maintaining the bright rings below the deterministic ablation threshold. The invention associates the femtosecond ablation technique with deterministic threshold and the apodisation technique.
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