Sheet Plasma Film-Forming Apparatus
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United States of America Patent
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Issued Date -
Dec 24, 2009
app pub date -
Nov 29, 2006
filing date -
Dec 6, 2005
priority date (Note) -
Abandoned
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Abstract
A sheet plasma film forming apparatus (100) of the present invention includes: a plasma gun (40) which can emit source plasma (22) in a transport direction; a sheet plasma converting chamber (20) including a transport space (21) extending in the transport direction; a pair of first magnetic field generating means (24A, 24B) disposed so as to sandwich the transport space (21) such that same poles thereof face each other; a film forming chamber (30) including a film forming space (31) which communicates with the transport space (21); and a pair of second magnetic field generating means (32, 33) disposed so as to sandwich the film forming space such that different poles thereof face each other, wherein: while moving in the transport space (21), the source plasma (22) is converted by a magnetic field of the pair of first magnetic field generating means (24A, 24B) into sheet-shaped plasma spreading along a main surface S including a center; and while moving in the film forming space (31), the sheet-shaped plasma 27 is caused to convexly project from the main surface S by a magnetic field of the pair of second magnetic field generating means (32, 33).
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