METHOD AND APPARATUS FOR ASSEMBLY OF CMP POLISHING PADS

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20090313905A1
SERIAL NO

12141907

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Polishing pads made up of individual polishing elements that protrude through holes in a guide plate are assembled by cascading a number of such polishing elements through a stack of assembly boxes in each of which are located the guide plates such that the polishing elements pass from an uppermost assembly box in the stack to a lowermost assembly box in the stack and in each respective assembly box of the stack are distributed over a respective guide plate therein. Accordingly, at least some of the polishing elements are captured within holes of the respective guide plates in the respective assembly boxes. The cascading may be initiated by displacement of the stack of assembly boxes about a pivot and the distribution of the polishing elements within the assembly boxes may be initiated by lateral displacement of the assembly boxes in the stack.

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Patent Owner(s)

Patent OwnerAddress
SEMIQUEST INC2362 BEARING DRIVE SAN JOSE CA 95131

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fisher, Lynn San Jose , US 2 2
Fisher, Stephen San Jose , US 37 1362

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