Sensor
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United States of America Patent
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Issued Date -
Dec 17, 2009
app pub date -
Apr 23, 2007
filing date -
Apr 21, 2006
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
In general, the invention relates to gas sensing techniques as such, but more specifically, to a sensor structure that comprises a buried electrode structure in the sensor layers, the structure being arranged to be applicable in the related devices and/or measurements. The invention relates also to a measurement method of sensor resistance, which method comprises a step of utilisation having a bias voltage or a grounding applied to the buried electrode.
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