Driver for MEMS device
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United States of America Patent
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N/A
Issued Date -
Dec 17, 2009
app pub date -
Jun 17, 2008
filing date -
Jun 17, 2008
priority date (Note) -
Abandoned
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Abstract
A driver for electrically causing a MEMS device to change shape or position includes an amplifier having a first feedback loop and a second feedback loop. The first feedback loop stabilizes output voltage and the second feedback loop reduces current changes through the MEMS device to zero.
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