SEMICONDUCTOR PROCESSING APPARATUS WITH IMPROVED THERMAL CHARACTERISTICS AND METHOD FOR PROVIDING THE SAME

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United States of America Patent

APP PUB NO 20090308315A1
SERIAL NO

12138909

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Abstract

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powder coating, and optionally sealing a surface of the applied coating.

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Patent Owner(s)

Patent OwnerAddress
ASM INTERNATIONAL N VALMERE

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
De, Ridder Christianus Gerardus Maria Hoogland , NL 14 2142

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