SELF-TILTED MICROMIRROR DEVICE
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United States of America Patent
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Issued Date -
Dec 10, 2009
app pub date -
May 20, 2008
filing date -
May 20, 2008
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A self-tilted micromirror device of the present invention comprises a plurality of micro-structures including a substrate, at least one stiction plate configured to be attracted to the substrate by adhesion force, a top plate coupled to the stiction plate elastically and configured to have at least one motion when the stiction plate is attracted to the substrate, and at least one pivot structure disposed between the substrate and the top plate and configured to provide a tilting point or area for the motion of the top plate. The motion of the top plate is determined by the geometry of the micro-structures of the self-tilted micromirror device.
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