PFET ENHANCEMENT DURING SMT

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United States of America Patent

APP PUB NO 20090302401A1
SERIAL NO

12133374

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An integrated circuit having a substrate on which first and second active regions are defined. The first active region comprises a first transistor and the second active region comprises a second transistor having a first type stress. A barrier layer is provided over the substrate to reduce outdiffusion of dopants in the first active region.

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Patent Owner(s)

Patent OwnerAddress
CHARTERED SEMICONDUCTOR MANUFACTURING LTD60 WOODLANDS INDUSTRIAL PARK D STREET 2 SINGAPORE 738406

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
LEE, Jae Gon Singapore , SG 65 797
QUEK, Elgin Singapore , SG 125 2412
TAN, Shyue Seng Singapore , SG 99 1027
TEO, Lee Wee Singapore , SG 40 517

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